diff --git a/java/tsfile/src/main/java/org/apache/tsfile/write/writer/TsFileIOWriter.java b/java/tsfile/src/main/java/org/apache/tsfile/write/writer/TsFileIOWriter.java
index 1ea6fa0c0..e0a3eb293 100644
--- a/java/tsfile/src/main/java/org/apache/tsfile/write/writer/TsFileIOWriter.java
+++ b/java/tsfile/src/main/java/org/apache/tsfile/write/writer/TsFileIOWriter.java
@@ -710,6 +710,8 @@ private int writeChunkMetadataToTempFile(
       writtenSize +=
           ReadWriteIOUtils.write(
               iChunkMetadataList.get(0).getDataType(), tempOutput.wrapAsStream());
+      writtenSize +=
+          ReadWriteIOUtils.write(iChunkMetadataList.get(0).getMask(), tempOutput.wrapAsStream());
     }
     PublicBAOS buffer = new PublicBAOS();
     int totalSize = 0;
diff --git a/java/tsfile/src/main/java/org/apache/tsfile/write/writer/tsmiterator/DiskTSMIterator.java b/java/tsfile/src/main/java/org/apache/tsfile/write/writer/tsmiterator/DiskTSMIterator.java
index f83ea947f..447bc4927 100644
--- a/java/tsfile/src/main/java/org/apache/tsfile/write/writer/tsmiterator/DiskTSMIterator.java
+++ b/java/tsfile/src/main/java/org/apache/tsfile/write/writer/tsmiterator/DiskTSMIterator.java
@@ -103,6 +103,7 @@ private Pair<Path, TimeseriesMetadata> getTimeSeriesMetadataFromFile() throws IO
     String measurementUid = ReadWriteIOUtils.readVarIntString(input.wrapAsInputStream());
     byte dataTypeInByte = ReadWriteIOUtils.readByte(input.wrapAsInputStream());
     TSDataType dataType = TSDataType.getTsDataType(dataTypeInByte);
+    byte mask = ReadWriteIOUtils.readByte(input.wrapAsInputStream());
     int chunkBufferSize = ReadWriteIOUtils.readInt(input.wrapAsInputStream());
     ByteBuffer chunkBuffer = ByteBuffer.allocate(chunkBufferSize);
     int readSize = ReadWriteIOUtils.readAsPossible(input, chunkBuffer);
@@ -116,7 +117,9 @@ private Pair<Path, TimeseriesMetadata> getTimeSeriesMetadataFromFile() throws IO
     // deserialize chunk metadata from chunk buffer
     List<IChunkMetadata> chunkMetadataList = new ArrayList<>();
     while (chunkBuffer.hasRemaining()) {
-      chunkMetadataList.add(ChunkMetadata.deserializeFrom(chunkBuffer, dataType));
+      ChunkMetadata chunkMetadata = ChunkMetadata.deserializeFrom(chunkBuffer, dataType);
+      chunkMetadata.setMask(mask);
+      chunkMetadataList.add(chunkMetadata);
     }
     updateCurrentPos();
     return new Pair<>(
diff --git a/java/tsfile/src/test/java/org/apache/tsfile/read/TsFileIOWriterFlushTempChunkMetadataTest.java b/java/tsfile/src/test/java/org/apache/tsfile/read/TsFileIOWriterFlushTempChunkMetadataTest.java
new file mode 100644
index 000000000..ab698e1e1
--- /dev/null
+++ b/java/tsfile/src/test/java/org/apache/tsfile/read/TsFileIOWriterFlushTempChunkMetadataTest.java
@@ -0,0 +1,130 @@
+/*
+ * Licensed to the Apache Software Foundation (ASF) under one
+ * or more contributor license agreements.  See the NOTICE file
+ * distributed with this work for additional information
+ * regarding copyright ownership.  The ASF licenses this file
+ * to you under the Apache License, Version 2.0 (the
+ * "License"); you may not use this file except in compliance
+ * with the License.  You may obtain a copy of the License at
+ *
+ *     http://www.apache.org/licenses/LICENSE-2.0
+ *
+ * Unless required by applicable law or agreed to in writing,
+ * software distributed under the License is distributed on an
+ * "AS IS" BASIS, WITHOUT WARRANTIES OR CONDITIONS OF ANY
+ * KIND, either express or implied.  See the License for the
+ * specific language governing permissions and limitations
+ * under the License.
+ */
+
+package org.apache.tsfile.read;
+
+import org.apache.tsfile.constant.TestConstant;
+import org.apache.tsfile.enums.TSDataType;
+import org.apache.tsfile.exception.write.WriteProcessException;
+import org.apache.tsfile.read.common.Path;
+import org.apache.tsfile.write.TsFileWriter;
+import org.apache.tsfile.write.record.Tablet;
+import org.apache.tsfile.write.schema.MeasurementSchema;
+import org.apache.tsfile.write.writer.TsFileIOWriter;
+
+import org.junit.After;
+import org.junit.Assert;
+import org.junit.Test;
+
+import java.io.File;
+import java.io.IOException;
+import java.nio.file.Files;
+import java.util.Arrays;
+
+public class TsFileIOWriterFlushTempChunkMetadataTest {
+
+  private static final String FILE_PATH1 =
+      TestConstant.BASE_OUTPUT_PATH.concat("TsFileIOWriterFlushTempChunkMetadataTest1.tsfile");
+  private static final String FILE_PATH2 =
+      TestConstant.BASE_OUTPUT_PATH.concat("TsFileIOWriterFlushTempChunkMetadataTest2.tsfile");
+
+  @After
+  public void teardown() {
+    new File(FILE_PATH1).delete();
+    new File(FILE_PATH2).delete();
+  }
+
+  @Test
+  public void testAligned() throws IOException, WriteProcessException {
+    try (TsFileIOWriter writer = new TsFileIOWriter(new File(FILE_PATH1), 1)) {
+      TsFileWriter tsFileWriter = new TsFileWriter(writer);
+      writeData(tsFileWriter, writer, true, true);
+      tsFileWriter.close();
+    }
+    try (TsFileIOWriter writer = new TsFileIOWriter(new File(FILE_PATH2))) {
+      TsFileWriter tsFileWriter = new TsFileWriter(writer);
+      writeData(tsFileWriter, writer, false, true);
+      tsFileWriter.close();
+    }
+    byte[] file1Contents = Files.readAllBytes(new File(FILE_PATH1).toPath());
+    byte[] file2Contents = Files.readAllBytes(new File(FILE_PATH2).toPath());
+    Assert.assertArrayEquals(file1Contents, file2Contents);
+  }
+
+  @Test
+  public void testNonAligned() throws IOException, WriteProcessException {
+    try (TsFileIOWriter writer = new TsFileIOWriter(new File(FILE_PATH1), 1)) {
+      TsFileWriter tsFileWriter = new TsFileWriter(writer);
+      writeData(tsFileWriter, writer, true, false);
+      tsFileWriter.close();
+    }
+    try (TsFileIOWriter writer = new TsFileIOWriter(new File(FILE_PATH2))) {
+      TsFileWriter tsFileWriter = new TsFileWriter(writer);
+      writeData(tsFileWriter, writer, false, false);
+      tsFileWriter.close();
+    }
+    byte[] file1Contents = Files.readAllBytes(new File(FILE_PATH1).toPath());
+    byte[] file2Contents = Files.readAllBytes(new File(FILE_PATH2).toPath());
+    Assert.assertArrayEquals(file1Contents, file2Contents);
+  }
+
+  private void writeData(
+      TsFileWriter tsFileWriter,
+      TsFileIOWriter tsFileIOWriter,
+      boolean flushChunkMetadataToTempFile,
+      boolean aligned)
+      throws WriteProcessException, IOException {
+    for (int i = 0; i < 10; i++) {
+      Tablet tablet =
+          new Tablet(
+              "root.test.d" + i,
+              Arrays.asList(
+                  new MeasurementSchema("s1", TSDataType.INT32),
+                  new MeasurementSchema("s2", TSDataType.INT32),
+                  new MeasurementSchema("s3", TSDataType.INT32)));
+      for (int j = 0; j < 1000; j++) {
+        tablet.addTimestamp(j, j);
+        tablet.addValue("s1", j, 0);
+        tablet.addValue("s2", j, 0);
+        tablet.addValue("s3", j, 0);
+      }
+      if (aligned) {
+        tsFileWriter.registerAlignedTimeseries(
+            new Path("root.test.d" + i),
+            Arrays.asList(
+                new MeasurementSchema("s1", TSDataType.INT32),
+                new MeasurementSchema("s2", TSDataType.INT32),
+                new MeasurementSchema("s3", TSDataType.INT32)));
+        tsFileWriter.writeAligned(tablet);
+      } else {
+        tsFileWriter.registerTimeseries(
+            new Path("root.test.d" + i), new MeasurementSchema("s1", TSDataType.INT32));
+        tsFileWriter.registerTimeseries(
+            new Path("root.test.d" + i), new MeasurementSchema("s2", TSDataType.INT32));
+        tsFileWriter.registerTimeseries(
+            new Path("root.test.d" + i), new MeasurementSchema("s3", TSDataType.INT32));
+        tsFileWriter.write(tablet);
+      }
+      tsFileWriter.flushAllChunkGroups();
+      if (flushChunkMetadataToTempFile) {
+        tsFileIOWriter.checkMetadataSizeAndMayFlush();
+      }
+    }
+  }
+}